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Rigaku and Tohoku University Team Up on X-Ray Research

Rigaku Corporation and Tohoku University established the Rigaku-Tohoku University Co-Creation Research Institute for X-ray Metrology: Beyond The Limits at Tohoku University on August 1, 2026. The Institute will advance X-ray metrology technology and develop new methods, addressing challenges in semiconductor manufacturing and fostering the next generation of researchers through an initial three-year collaboration.
Rigaku Corporation and Tohoku University will launch the Rigaku-Tohoku University Co-Creation Research Institute for X-ray Metrology: Beyond The Limits on August 1, 2026, focusing on advancements in X-ray measurement technology. The new institute addresses limitations in current semiconductor analysis, specifically by prioritizing soft X-rays, X-rays with longer wavelengths and lower energy than conventional methods. This three-year collaboration between the…
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