Efficient formation and identification of single emitters in 4H-SiC following maskless heavy ion implantation

Authors:S. Eserin, L. K. S. Zimmermann, E. Schneider, M. Ludlow, J. Heiler, O. G. Lloyd-Willard, K. Stockbridge, G. Aresta, L. Antwis, S. K. Clowes, M. Hofmann, S. Kucera, P. Berwian, F. Kaiser, B. N. Murdin

Abstract:Single photon emitters in silicon carbide (SiC) are a leading platform for scalable quantum technologies. Recent interest has focused on oxygen-vacancy-related emitters, which show exceptionally high optical brightness and strong spin readout contrast. One barrier to scalable quantum devices based on these emitters is the challenge of maskless formation and rapid identification. Here, we demonstrate the formation of isolated bright single emitters in 4H-SiC, using low-energy maskless implantation of heavy ions bismuth and tin. Following annealing, up to 18% of implanted sites host a single emitter, with optimal yields achieved at annealing temperatures of 900-1000 degrees C. Occupancy statistics are modelled to estimate the implantation dose that maximises single-emitter yield. We introduce a tiered characterisation scheme, where a simple intensity threshold isolates single-emitter candidates, confirmed through photon correlation measurements, after which correlations between polarisation, saturation count rate and magnetic resonance frequency assign emitter type. It is shown that time-consuming low-temperature spectroscopy is not necessary to distinguish emitter types. Together, maskless heavy-ion implantation and selective screening offer an efficient route to forming and rapidly identifying near-surface single emitters for room-temperature quantum technologies such as quantum sensing.

arXiv:2608.27281 [quant-ph]

(or arXiv:2608.27281v1 [quant-ph] for this version)

https://doi.org/10.48550/arXiv.2608.27281 arXiv-issued DOI via DataCite (pending registration)